Comparative Study of the Capabilities of Various Micromachining Processes

Master's Thesis from the year 2002 in the subject Engineering - Mechanical Engineering, grade: 1.0 (A), University of Illinois at Chicago (Department of Mechanical Engineering), language: English, abstract: Introduction 1.1 Background and Motivation There has been a significant increase in the importance of miniature parts in recent years. The forerunner of this technology was mostly the electron...