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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale * Highlights the advanced research work from industry and academia in micro-nano devices test technology * Written at both introductory and advanced levels, provides the fundamentals and theories * Focuses on the measurement techniques for characterizing MEMS/NEMS devices
  • Book type: E-book
  • Language: English
  • Ean Code: 9781118717981
  • ISBN: 9781118717981
  • Publisher: John Wiley & Sons
  • E-Book type: PDF
  • Author: Wendong Zhang
  • Kopierschutz: Adobe DRM
  • Gift: No
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