MEMS Module. Multistage Micro-Hydraulic Displacement Amplifier Actuation

Akademische Arbeit aus dem Jahr 2016 im Fachbereich Elektrotechnik, , Sprache: Deutsch, Abstract: This paper explains the importance of Micro-Electro-Mechanical Systems (MEMS) in the modern world. The last 30 years of Micro-Electro-Mechanical Systems (MEMS) have been seen as an era of exponential development of electronic devices such as sensors and actuators on the order of micro dimension. Throughout these three decades, MEMS becomes the key to make a multibillion dollar industrial production from the very beginning of the research and experimental outcomes in the laboratories. Besides the electronic devices there are lots of applications of MEMS in small robotics is found today. Different types of MEMS actuators are designed to study and lots of diverse researches have been conducted on those designs to build small microrobots.